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Plants & Accessories Division
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Ultra High Purity Diaphragm Valves  
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Ultra high purity gas piping system
DESCRIPTION

Feature

  • It is featured that the diaphragm valve serves economical, high performance and long cycle life time.
  • Electropolished, D.I. water cleaned, assembled, tested and packaged in a certified clean room.
  • The diaphragm valve is used for shut-off isolation in gas control systems, and analyzer sampling systems.


Specification

Size1/4"3/8", 1/2"3/4"
Cv Value0.30.70.7
Orifice Size4.5mm7.0mm7.0mm
Max. Working Pressure10 bar(145 psig)
Operating Pressure (Pneumatic)0.4~0.6 Mpa(58~87 psig)
Max. Working Temperature-10°C ~ 80°C (-23°F~176°F)
Internal Leakage Allowance(He) ≤ 1x10-8 atm.cc/s
Test Pressure ≤ 1x10-8Torr
Holding Time ≥ 30sec.
External Leakage Allowance(He) ≤ 1x10-9 atm.cc/s
Test Pressure ≤ 1x10-8Torr
Holding Time ≥ 1min.

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